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  • , , , , :
    Nanopositioning and - measuring technique
    7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life (Novosibirsk)
    In: Proceedings Volume 4900, 7th International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
    DOI: 10.1117/12.484563

2000